Fourteen of 40 companies at the William Hanna Center for Innovation at Shady Grove already have moved to new space, and county employees are working with the rest to find new homes, county economic development head Steven A. Silverman said Wednesday. The new sites include the Germantown Innovation Center and the Montgomery campus of Johns Hopkins University in Rockville, as well as private space, he said. The county is in the process of replacing its oldest business incubator with a national cybersecurity center aligned with the National Institute of Standards and Technology of Gaithersburg. That plan has been met with opposition from not just tenants, but several Montgomery state legislators and former County Executive Douglas M. Duncan, who is running against County Executive Isiah Leggett in the Democratic primary in June.